CWxZ Ceramic Heater
Dual Zone Ceramic Heater
DxZ Ceramic Heater
Ceramic Heater
TxZ MCA E-Chuck Assy
Novellus Speed HDP ESC
Endura MCA DT ESC
| Producer Ceramic Heater | ||||||||||||
| 0010-03840 | 0010-04461 | 0010-08265 | 0010-11681 | 0010-11908 | 0010-23014 | 0010-23794 | 0010-24189 | 0010-24299 | 0010-24300 | 0010-24685 | 0010-25415 | |
| 0010-28081 | 0010-29128 | 0010-29907 | 0010-30838 | 0010-31707 | 0010-31708 | 0010-31709 | 0010-31724 | 0010-31871 | 0010-31879 | 0010-36734 | 0010-36736 | |
| 0010-36738 | 0010-36740 | 0010-48841 | 0010-53708 | 0010-53901 | 0010-59787 | 0010-59788 | 0010-59789 | 0010-59794 | 0010-59797 | 0010-59798 | 0010-62742 | |
| 0010-63447 | 0010-63632 | 0010-67836 | 0010-79281 | 0010-81422 | 0021-98485 | 0040-04048 | 0040-07033 | 0040-42270 | 0040-44585 | 0040-49020 | 0040-53976 | |
| 0040-76895 | 0040-82041 | 0040-82421 | 0040-84051 | 0040-85475 | 0040-85725 | 0040-89894 | 0041-01652 | 0041-43070 | 0041-52913 | 0041-52993 | 0041-61870 | |
| 0041-85012 | 0041-86235 | 0041-90645 | 0041-94251 | 0041-96727 | 0041-99802 | 0042-05675 | 0042-05967 | 0042-08991 | 0042-15181 | 0042-15261 | 0042-16611 | |
| 0042-20841 | 0190-05083 | |||||||||||
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